Fraunhofer-Institut für Elektronische Nanosysteme ENAS: Smart systems for different applications

The Fraunhofer Institute for Electronic Nano Systems ENAS focuses on applied research and development in the field of smart systems integration by using micro and nano technologies.

The product and ser­­vice portfolio of Fraunhofer ENAS covers high-precision sensors for industrial appli­­ca­tions, sensor and actuator systems with control units and evaluation electro­­nics, printed functionalities like antennas and batteries as well as material and reliability research for micro electron­ics and micro system tech­­nology. The develop­­ment, the design and the test of silicon-based and polymer-based MEMS/NEMS, methods and technologies for their encap­­sulation and integration with electronics as well as metallization and interconnect systems for micro and nano electronics and 3D integration are especially in the focus of the work.

Special attention is paid to security and reliability of components and systems. Application areas are semi­­­­conductor industry, medical engin­­eering, mechanical engineering, auto­­motive indus­­try, logistics as well as aeronautics.




  1. Address

    Technologie-Campus 3
    D-09126 Chemnitz
    Telefon +49 (0) 371 45001-0
    Telefax +49 (0) 371 45001-101
  2. Year of establishment

  3. Business activity

    Design and test of components and
    systems, silicon-based technologies for
    micro and nano systems, polymer-based
    technologies for micro and nano systems, printed functionalities, back-End of line
    technologies for micro and nano electronics, system integration technologies, reliability and security of components and systems