ML&C Masken Lithographie & Consulting GmbH in Jena is a manufacturer of masks for photolithography. Since 1992 the privately owned company has been on the market. The company’s core competency is the high-precision lithographic structuring of photomasks using e-beam and laser exposure tools. The main products are reticles for projection lithography, 1 x masks for contact and proximity lithography and mask copies. Other products of the company are masters for optical metrology and the processing of components for micro-technology.
Three clean-rooms are available in the company’s facility. There are two of each piece of equipment for exposure in order to avoid delay and to ensure processing to proceed in case of maintenance. Reticles with minimum feature sizes down to the sub-µm level may be processed as well as 1 x masks from three inch size up to formates of nine inch, 14 inch, and even larger (for instance wafer level packaging of 200 millimeters and 300 millimeters wafers). For mask users ML&C offers services like re-pelliclization, mask repair and cleaning.
The company is well known in the market for its versatility and flexibility to the customer preferences.
Year of foundation1992
Core competencePhotomask manufacturing
1 x Masks
Business fieldsSemiconductor industry