The Fraunhofer Institute for Electronic Nano Systems ENAS focuses on applied research and development in the field of smart systems integration by using micro and nano technologies.
The product and service portfolio of Fraunhofer ENAS covers high-precision sensors for industrial applications, sensor and actuator systems with control units and evaluation electronics, printed functionalities like antennas and batteries as well as material and reliability research for micro electronics and micro system technology. The development, the design and the test of silicon-based and polymer-based MEMS/NEMS, methods and technologies for their encapsulation and integration with electronics as well as metallization and interconnect systems for micro and nano electronics and 3D integration are especially in the focus of the work.
Special attention is paid to security and reliability of components and systems. Application areas are semiconductor industry, medical engineering, mechanical engineering, automotive industry, logistics as well as aeronautics.
Address
Technologie-Campus 3
D-09126 Chemnitz
Telefon +49 (0) 371 45001-0
Telefax +49 (0) 371 45001-101
info@enas.fraunhofer.de
www.enas.fraunhofer.deYear of establishment
2008Business activity
Design and test of components and
systems, silicon-based technologies for
micro and nano systems, polymer-based
technologies for micro and nano systems, printed functionalities, back-End of line
technologies for micro and nano electronics, system integration technologies, reliability and security of components and systems